Mechanical properties of nitrogen-doped CZ silicon crystals

By Orlov V.   Richter H.   Fischer A.   Reif J.   Muller T.   Wahlich R.  

Materials Science in Semiconductor Processing, Vol. 5, Iss. 4, 2002-08 ,pp. : 403-407

Elsevier

Access to resources Recommend Favorite

Oxide precipitates in annealed nitrogen-doped 300mm CZ-SI

By Akhmetov V.D.   Richter H.   Lysytskiy O.   Wahlich R.   Muller T.  

Materials Science in Semiconductor Processing, Vol. 5, Iss. 4, 2002-08 ,pp. : 391-396

Elsevier

Access to resources Recommend Favorite

Effect of heat treatment on the optical and electrical properties of nitrogen-doped silicon samples

By Binetti S.   Pizzini S.   Somaschini R.   Le Donne A.   Li D.   Yang D.  

Microelectronic Engineering, Vol. 66, Iss. 1, 2003-04 ,pp. : 297-304

Elsevier

Access to resources Recommend Favorite

Formation of stacking faults in nitrogen-doped silicon single crystals

By Ammon W.v.   Holzl R.   Wetzel T.   Zemke D.   Raming G.   Blietz M.  

Microelectronic Engineering, Vol. 66, Iss. 1, 2003-04 ,pp. : 234-246

Elsevier

Access to resources Recommend Favorite

Formation of the thermal donors in the hydrogen-implanted nitrogen-doped silicon crystal

By Antonova I.V.   Yang D.   Popov V.P.   Obodnikov V.I.   Misiuk A.  

Microelectronic Engineering, Vol. 66, Iss. 1, 2003-04 ,pp. : 367-372

Elsevier

Access to resources Recommend Favorite