DLTS study of bonded interface in silicon-on-insulator structures annealed in hydrogen atmosphere

Author: Antonova I.V.   Stano J.   Naumova O.V.   Popov V.P.   Skuratov V.A.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 547-552

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Abstract