Author： Torchynska T.V. Aguilar-Hernandez J. Schacht Hernandez L. Polupan G. Goldstein Y. Many A. Jedrzejewski J. Kolobov A.
Publisher： Elsevier
ISSN： 0167-9317
Source： Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 83-90
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