Author： Shao Q.-Y. Li A.-D. Ling H.-Q. Wu D. Wang Y. Feng Y. Yang S.-Z. Liu Z.-G. Wang M. Ming N.-B.
Publisher： Elsevier
ISSN： 0167-9317
Source： Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 842-848
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