Mechanistic study of borosilicate glass growth by low-pressure chemical vapor deposition from tetraethylorthosilicate and trimethylborate

Author: Hansen D.   Charters D.   Au Y.   Mak W.   Tejasukmana W.   Moran P.   Kuech T.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.29, Iss.11, 2000-11, pp. : 1312-1318

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