Preparation of PZT(53/47) thick films deposited by a dip-coating process

Author： He X.-Y. Ding A.-L. Zheng X.-S. Qiu P.-S. Luo W.-G.

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 865-871

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Effect of substrates on epitaxial PZT films by a coating photolysis process

By Tsuchiya T. Yamaguchi I. Manabe T. Kumagai T. Mizuta S.

Materials Science in Semiconductor Processing, Vol. 5, Iss. 2, 2002-04 ,pp. : 207-210

Elsevier

Access to resources Recommend Favorite

Properties of PZT thick films made on LTCC

By Golonka L.J. Buczek M. Hrovat M. Belavic D. Dziedzic A. Roguszczak H. Zawada T.

Microelectronics International, Vol. 22, Iss. 2, 2005-08 ,pp. : 13-16

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

Fabrication of thick Pb(Zr,Ti)O 3 (PZT) films by modified sol–gel methods for application in MEMS

By Lu Jian Chu Jiaru Yang Yan Huang Wenhao

Journal of Micromechatronics, Vol. 2, Iss. 3-4, 2002-12 ,pp. : 159-171

VSP

Access to resources Recommend Favorite

Synthesis of the PZT films deposited on pt-coated (100) Si substrates for nonvolatile memory applications

By Kumar Ashok Alam M. Mangiaracina A. Shamsuzzoha M.

Journal of Electronic Materials, Vol. 26, Iss. 11, 1997-11 ,pp. : 1331-1334

Springer Publishing Company

Access to resources Recommend Favorite

Ferroelectric thin and thick films for microsystems

By Whatmore R.W. Zhang Q. Huang Z. Dorey R.A.

Materials Science in Semiconductor Processing, Vol. 5, Iss. 2, 2002-04 ,pp. : 65-76

Elsevier

Access to resources Recommend Favorite