Time-dependent dielectric breakdown in pure and lightly Al-doped Ta 2 O 5 stacks

Author： Atanassova E.   Stojadinović N.   Spassov D.   Manić I.   Paskaleva A.  

Publisher： IOP Publishing

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.28, Iss.5, 2013-05, pp. : 55006-55014

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