Influence of growth and annealing temperatures on the electrical properties of Nb 2 O 5 -based MIM capacitors

Author： García H. Castán H. Perez E. Dueñas S. Bailón L. Blanquart T. Niinistö J. Kukli K. Ritala M. Leskelä M.

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.28, Iss.5, 2013-05, pp. : 55005-55009

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