Plasma CVD of \hbox{(BaSr)TiO}_{3} Dielectrics for Gigabit DRAM Capacitors

Author: Yoshida M.  

Publisher: Springer Publishing Company

ISSN: 1385-3449

Source: Journal of Electroceramics, Vol.3, Iss.2, 1999-06, pp. : 123-133

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