Beryllium Ion Implantation into GaAs and Pseudomorphic AIGaAs/lnGaAs/GaAs Heterostructure

Author: Thiery J.   Fawaz H.   Pesant J.   Linh N.   Salmer G.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.1, 1997-12, pp. : 16-20

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