Field isolation for GaN MOSFETs on AlGaN/GaN heterostructure with boron ion implantation

Author: Jiang Y   Wang Q P   Tamai K   Li L A   Shinkai S   Miyashita T   Motoyama S-I   Wang D J   Ao J-P   Ohno Y  

Publisher: IOP Publishing

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.29, Iss.5, 2014-05, pp. : 55002-55009

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