Dry etching of III-V semiconductors in IBr/Ar electron cyclotron resonance plasmas

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Springer Publishing Company

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Bromine ion-beam-assisted etching of III–V semiconductors

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III-V semiconductors solve mechanical riddle

By Dunstan D.   Bushby A.   Gillin B.  

III-Vs Review, Vol. 16, Iss. 9, 2003-12 ,pp. : 39-41

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