Hydrogen passivation in n- and p-type 6H-SiC

Author: Ren F.   Grow J.   Bhaskaran M.   Wilson R.   Pearton S.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.3, 1997-03, pp. : 198-202

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Abstract