Continuous in situ growth rate extraction using pyrometric interferometry and laser reflectance measurement during molecular beam epitaxy

Author： Zhou J.J. Li Y. Thompson P. Chu R. Lee H.P. Kao Y.C. Celii F.G.

Publisher： Springer Publishing Company

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.26, Iss.9, 1997-09, pp. : 1083-1089

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