Crystallographic texture of C54 titanium disilicide as a function of deep submicron structure geometry

Author: Svilan V.   Rodbell K.P.   Clevenger L.A.   Cabral C.   Roy R.A.   Lavoie C.   Jordan-Sweet J.   Harper J.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.9, 1997-09, pp. : 1090-1095

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract