Inductively coupled plasma etching of InGaP, AllnP, and AlGaP in Cl 2 and BCl 3 chemistries

Author: Hong J.   Lambers E.   Abernathy C.   Pearton S.   Shul R.   Hobson W.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.27, Iss.3, 1998-03, pp. : 132-137

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