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Author: Ramachandran V. Brady M. Smith A. Feenstra R. Greve D.
Publisher: Springer Publishing Company
ISSN: 1543-186X
Source: Journal of Electronic Materials, Vol.27, Iss.4, 1998-04, pp. : 308-312
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Surface chemistry of porous silicon carbide
By Shin W. Seo W. Takai O. Koumoto K.
Journal of Electronic Materials, Vol. 27, Iss. 4, 1998-04 ,pp. :