Radiation-enhanced thermal oxidation of silicon

By Simakov A.   Bashin A.  

Russian Microelectronics, Vol. 36, Iss. 1, 2007-02 ,pp. : 53-55

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Polysilicon nanogap fabrication using a thermal oxidation process

By Dhahi T.S.   Hashim U.   Ali M.E.   Taib Nazwa  

Microelectronics International, Vol. 29, Iss. 1, 2012-01 ,pp. : 40-46

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

Phosphorus implantation into 4H-silicon carbide

By Capano M.   Santhakumar R.   Venugopal R.   Melloch M.   Cooper J.  

Journal of Electronic Materials, Vol. 29, Iss. 2, 2000-02 ,pp. : 210-214

Springer Publishing Company

Access to resources Recommend Favorite

Enhanced optical performance of electrochemically etched porous silicon carbide

By Naderi N   Hashim M R   Saron K M A   Rouhi J  

Semiconductor Science and Technology, Vol. 28, Iss. 2, 2013-02 ,pp. : 25011-25017

IOP Publishing

Access to resources Recommend Favorite

Preparation of atomically flat surfaces on silicon carbide using hydrogen etching

By Ramachandran V.   Brady M.   Smith A.   Feenstra R.   Greve D.  

Journal of Electronic Materials, Vol. 27, Iss. 4, 1998-04 ,pp. : 308-312

Springer Publishing Company

Access to resources Recommend Favorite