SIMS analysis of nitrided oxides grown on 4H-SiC

Author: Tanner P.   Dimitrijev S.   Li H-F.   Sweatman D.   Prince K.   Harrison H.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.28, Iss.2, 1999-02, pp. : 109-111

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