Phosphorus implantation into 4H-silicon carbide

Author: Capano M.   Santhakumar R.   Venugopal R.   Melloch M.   Cooper J.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.29, Iss.2, 2000-02, pp. : 210-214

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Abstract