Author: Onishi Takashi
Publisher: Springer Publishing Company
ISSN: 1543-186X
Source: Journal of Electronic Materials, Vol.39, Iss.10, 2010-10, pp. : 2255-2266
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Barrier layers for Cu ULSI metallization
Journal of Electronic Materials, Vol. 30, Iss. 4, 2001-04 ,pp. :
By KimJungsik OhHyeongwan LeeJunyoung BaekChang-Ki MeyyappanM LeeJeong-Soo
Semiconductor Science and Technology, Vol. 30, Iss. 8, 2015-08 ,pp. :