Implantation angle dependence of ion irradiation damage in GaN

Author: Nord J.   Nordlund K.   Pipeleers B.   Vantomme A.  

Publisher: Elsevier

ISSN: 0921-5107

Source: Materials Science and Engineering: B, Vol.105, Iss.1, 2003-12, pp. : 110-112

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Abstract