Fabrication and characterization of thick porous silicon layers for rf circuits

Author: You S.Z.   Long Y.F.   Xu Y.S.   Zhu Z.Q.   Shi Y.L.   Lai Z.S.   Li Z.F.   Lu W.   Li A.Z.  

Publisher: Elsevier

ISSN: 0924-4247

Source: Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 117-120

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Abstract