Structural changes in nanocrystalline silicon deposited by rf-magnetron sputtering

Author: Kim W.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.79, Iss.7, 2004-11, pp. : 1813-1817

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract