X-ray characterization of crystal perfection and surface contamination in large-diameter silicon wafers
Author： Kawado S.
Publisher： Elsevier
ISSN： 1369-8001
Source： Materials Science in Semiconductor Processing, Vol.5, Iss.4, 2002-08, pp. : 435-444
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Access to resources
Recommend
