Experimental study of the anode injection efficiency reduction of 3.3-kV-class NPT-IGBTs due to backside processes

Author： Huaping Jiang Bo Zhang Chuang Liu Wanjun Chen Zugang Rao Bin Dong

ISSN： 1674-4926

Source： Journal of Semiconductors, Vol.33, Iss.2, 2012-02, pp. : 24003-24006

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