Comparison of tribological behavior of three films - TiN, TiCN and CrN - grown by physical vapor deposition

Author： Su Y.L. Yao S.H. Leu Z.L. Wei C.S. Wu C.T.

Publisher： Elsevier

ISSN： 0043-1648

Source： Wear, Vol.213, Iss.1, 1997-12, pp. : 165-174

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Characterization of multilayered Ti/TiN films grown by chemical vapor deposition

By Hu J.C. Chang T.C. Chen L.J. Yang Y.L. Chang C.Y.

Thin Solid Films, Vol. 332, Iss. 1, 1998-11 ,pp. : 423-427

Elsevier

Access to resources Recommend Favorite

Comparisons of characterizations and tribological performance of TiN and CrN deposited by cathodic arc plasma deposition process

By Su Y.L. Yao S.H. Wu C.T.

Wear, Vol. 199, Iss. 1, 1996-11 ,pp. : 132-141

Elsevier

Access to resources Recommend Favorite

Effects of chlorine on tribological properties of TiN films prepared by pulsed d.c. plasma-enhanced chemical vapor deposition

By Kawata K. Sugimura H. Takai O.

Thin Solid Films, Vol. 407, Iss. 1, 2002-03 ,pp. : 38-44

Elsevier

Access to resources Recommend Favorite

Tribological investigation of TiAlCrN and TiAlN/CrN coatings grown by combined steered-arc/unbalanced magnetron deposition

By Luo Q. Rainforth W.M. Donohue L.A. Wadsworth I. Munz W.-D.

Vacuum, Vol. 53, Iss. 1, 1999-05 ,pp. : 123-126

Elsevier

Access to resources Recommend Favorite

Micro-scratch test study of TiN films grown on silicon by chemical vapor deposition

By Benayoun S. Hantzpergue J.J. Bouteville A.

Thin Solid Films, Vol. 389, Iss. 1, 2001-06 ,pp. : 187-193

Elsevier

Access to resources Recommend Favorite