Fabrication of PZT Thin Films by Liquid Delivery MOCVD with Conventional Multi-Sources and a Novel Cocktail Source

Author： Shiosaki Tadashi   Okamura Soichiro   Miyake Masato   Otani Yohei   Abe Norikazu  

Publisher： Taylor & Francis Ltd

ISSN： 0015-0193

Source： Ferroelectrics, Vol.293, Iss.1, 2003-01, pp. : 69-88

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