Fabrication of Ferroelectric Microstructures by Electron-Beam-Induced Patterning Process

Author: Fujii Tadashi   Nakata Kazuhisa   Adachi Masatoshi  

Publisher: Taylor & Francis Ltd

ISSN: 0015-0193

Source: Ferroelectrics, Vol.356, Iss.1, 2007-01, pp. : 253-257

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Abstract