SELECTIVE REMOVAL OF HIGH-K GATE DIELECTRICS

Author： Shamiryan D.   Baklanov M.   Claes M.   Boullart W.   Paraschiv V.  

Publisher： Taylor & Francis Ltd

ISSN： 0098-6445

Source： Chemical Engineering Communications, Vol.196, Iss.12, 2009-12, pp. : 1475-1535

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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