Amorphous SiC films prepared by low-energy cluster beam deposition

Author: Melinon P.   Keghelian P.   Perez A.   Rousset J. L.   Cadrot A. M.   Malhomme A.   Renouprez A. J.   Aires F. J. Cadete Santos  

Publisher: Taylor & Francis Ltd

ISSN: 0141-8610

Source: Philosophical Magazine. A. Physics of Condensed Matter. Defects and Mechanical Properties, Vol.80, Iss.1, 2000-01, pp. : 143-154

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Abstract