Usefulness of surfactants in reducing particle adhesion and their effectiveness in cleaning silicon wafers

Author： Veeramasuneni S.   Free M.L.   Miller J.D.  

Publisher： Taylor & Francis Ltd

ISSN： 1568-5616

Source： Journal of Adhesion Science and Technology, Vol.12, Iss.2, 1998-01, pp. : 185-195

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