Fabrication of electrostatic micro-actuators for a hard disk drive application

Author： Iizuka Tetsuhiko   Fujita Hiroyuki  

Publisher： VSP

ISSN： 1568-5632

Source： Journal of Micromechatronics, Vol.2, Iss.1, 2002-04, pp. : 47-64

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Analysis, testing and optimisation of electrostatic comb-drive levitational actuators

By Molfese A.   Nannini A.   Pennelli G.   Pieri F.  

Analog Integrated Circuits and Signal Processing, Vol. 48, Iss. 1, 2006-08 ,pp. : 33-40

Springer Publishing Company

Access to resources Recommend Favorite

A Low Power Adaptive Equalizer for PRML Disk-Drive Read Channels

By Ki H.J.  

Analog Integrated Circuits and Signal Processing, Vol. 34, Iss. 3, 2003-03 ,pp. : 211-220

Springer Publishing Company

Access to resources Recommend Favorite

Fabrication of a micro-cantilever gold plated beams array

By Kafumbe Said M.M.  

Microelectronics International, Vol. 31, Iss. 1, 2013-12 ,pp. : 8-23

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

A novel hybrid III–V/silicon deformed micro-disk single-mode laser

By  

Journal of Semiconductors, Vol. 36, Iss. 2, 2015-02 ,pp. : 24012-24016

IOP Publishing

Access to resources Recommend Favorite

Fabrication of suspended thin film resonator for application of RF bandpass filter

By Kim H.H.   Ju B.K.   Lee Y.H.   Lee S.H.   Lee J.K.   Kim S.W.  

Microelectronics Reliability, Vol. 44, Iss. 2, 2004-02 ,pp. : 237-243

Elsevier

Access to resources Recommend Favorite