Design and synthesis of wide tuning range variable comb drive MEMS capacitors

Author: Wan Weijie   Lowther David A.  

Publisher: Emerald Group Publishing Ltd

ISSN: 0332-1649

Source: COMPEL: Int J for Computation and Maths. in Electrical and Electronic Eng., Vol.26, Iss.3, 2007-06, pp. : 689-699

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Abstract