Prediction of silicon dry etching using a piecewise linear algorithm

Author： Jimenez-Fernandez V.M.   Reyes-Betanzo C.   Angelica-Cerdan M.   Hernandez-Paxtian Z.J.   Vazquez-Leal H.   Itzmoyotl-Toxqui A.  

Publisher： Taylor & Francis Ltd

ISSN： 0253-3839

Source： Journal of the Chinese Institute of Engineers, Vol.36, Iss.7, 2013-10, pp. : 941-950

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