Topological transformation of submicron VLSIs for the double lithographic mask technology

Author: Shakhnov V.   Zinchenko L.   Verstov V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.42, Iss.6, 2013-11, pp. : 347-359

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Abstract