Combined AFM and laser lithography on hydrogen-passivated amorphous silicon

Author: Birkelund K.   Mullenborn M.   Grey F.   Jensen F.   Madsen S.  

Publisher: Academic Press

ISSN: 0749-6036

Source: Superlattices and Microstructures, Vol.20, Iss.4, 1996-12, pp. : 555-560

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Abstract