Concepts and issues in piezo-on-3D silicon structures

Author: Sweet John Henry   Hutson David   Cochran Sandy   Bernassau Anne  

Publisher: Emerald Group Publishing Ltd

ISSN: 0260-2288

Source: Sensor Review, Vol.29, Iss.4, 2009-09, pp. : 326-332

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract