Fabrication of a MEMS accelerometer to detect heart bypass surgery complications

Author： Lowrie Craig   Desmulliez Marc P.Y.   Hoff Lars   Elle Ole Jakob   Fosse Erik  

Publisher： Emerald Group Publishing Ltd

ISSN： 0260-2288

Source： Sensor Review, Vol.29, Iss.4, 2009-09, pp. : 319-325

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

MEMS fabrication

By Huff Michael  

Sensor Review, Vol. 22, Iss. 1, 2002-02 ,pp. : 18-33

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

CMOS MEMS Fabrication Technologies and Devices

By Qu Hongwei  

Micromachines, Vol. 7, Iss. 1, 2016-01 ,pp. : 14-14

MDPI

Access to resources Recommend Favorite

Study of a Novel MEMS Accelerometer with Low Noise Reduced by Actuators

By Dong Linxi   Cui Yingying   Huo Weihong   Yan Haixia   Sun Lingling  

Integrated Ferroelectrics, Vol. 145, Iss. 1, 2013-01 ,pp. : 68-79

Taylor & Francis Ltd

Access to resources Recommend Favorite

SOL-GEL FABRICATION OF PZT THICK FILMS FOR MEMS

By Corkovic S.   Whatmore R. W.   Zhang Q.  

Integrated Ferroelectrics, Vol. 88, Iss. 1, 2007-02 ,pp. : 93-102

Taylor & Francis Ltd

Access to resources Recommend Favorite

Method of Measuring the Mismatch of Parasitic Capacitance in MEMS Accelerometer Based on Regulating Electrostatic Stiffness

By Dong Xianshan   Yang Shaohua   Zhu Junhua   En Yunfei   Huang Qinwen  

Micromachines, Vol. 9, Iss. 3, 2018-03 ,pp. : 128-128

MDPI

Access to resources Recommend Favorite