Fabrication of a membrane type double cavity vacuum-sealed micro sensor for absolute pressure based on front-side lateral etching technology

Author: Rathore Pradeep Kumar   Akhtar Jamil  

Publisher: Emerald Group Publishing Ltd

ISSN: 0260-2288

Source: Sensor Review, Vol.31, Iss.1, 2011-01, pp. : 41-46

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