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Micromachines, Vol. 9, Iss. 3, 2018-02 ,pp. : 104-104

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A wet-etch method with improved yield for realizing polysilicon resistors in batch fabrication of MEMS pressure sensor

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Sensor Review, Vol. 29, Iss. 3, 2009-06 ,pp. : 260-265

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Development of a combined piezoresistive pressure and temperature sensor using a chemical protective coating for Kraft pulp digester process monitoring

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Journal of Micromechanics and Microengineering, Vol. 21, Iss. 1, 2011-01 ,pp. : 15009-15018

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Design, fabrication and characterization of a piezoelectric MEMS diaphragm resonator mass sensor

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Polysilicon in situ phosphorus doping control over large concentration range using low temperature, low pressure chemical vapour deposition growth process

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