Strain analysis of arsenic-doped silicon using CBED rocking curves of low-order reflections

Author： Tsuda Kenji Mitsuishi Hajime Terauchi Masami Kawamura Kazuo

ISSN： 0022-0744

Source： Journal of Electron Microscopy, Vol.56, Iss.2, 2007-04, pp. : 57-61

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