Third-order spherical aberration correction using multistage self-aligned quadrupole correction-lens systems

Author: Tamura Keiji   Okayama Shigeo   Shimizu Ryuichi  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.59, Iss.3, 2010-06, pp. : 197-206

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