Automated characterization of bending and expansion of a lattice of a Si substrate near a SiGe/Si interface by using split HOLZ line patterns

Author： Saitoh Koh   Yasuda Yoshifumi   Hamabe Maiko   Tanaka Nobuo  

Publisher： Oxford University Press

ISSN： 0022-0744

Source： Journal of Electron Microscopy, Vol.59, Iss.5, 2010-10, pp. : 367-378

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