Quantitative backscattered electron imaging of field emission scanning electron microscopy for discrimination of nano-scale elements with nm-order spatial resolution

Author: Kim Hyonchol   Negishi Tsutomu   Kudo Masato   Takei Hiroyuki   Yasuda Kenji  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.59, Iss.5, 2010-10, pp. : 379-385

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Abstract