High-resolution three-dimensional scanning transmission electron microscopy characterization of oxidenitrideoxide layer interfaces in Si-based semiconductors using computed tomography

Author： Sadayama Shoji   Sekiguchi Hiromi   Bright Alexander   Suzuki Naohisa   Yamada Kazuhiro   Kaneko Kenji  

Publisher： Oxford University Press

ISSN： 0022-0744

Source： Journal of Electron Microscopy, Vol.60, Iss.3, 2011-06, pp. : 243-251

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