Characterization of an Atomospheric-Pressure Parallel-Plate Capacitively Coupled Radio-Frequency Plasma

Author: Huang Degui   Blades M. W.  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.45, Iss.9, 1991-11, pp. : 1468-1477

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