Investigation of the dimensional variation of microstructures through the µMIM process

Author： Fu G. Li S.G. Reading I. Chaturvedi P. Tor S.B. Yoon S.F. Youcef-Toumi K.

ISSN： 1746-9392

Source： International Journal of Nanomanufacturing, Vol.1, Iss.6, 2008-04, pp. : 722-735

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