Phase Composition, Orientation, and Substructure of Iridium Silicide Films on Silicon

Author： Ievlev V.M.   Kushchev S.B.   Rudneva I.G.   Soldatenko S.A.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 0020-1685

Source： Inorganic Materials, Vol.39, Iss.5, 2003-05, pp. : 472-478

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