Deposition of cubic silicon carbide thin films via thermal decomposition of methyltrichlorosilane in hydrogen

Author： Ivanova L.   Aleksandrov P.   Demakov K.   Starostin V.   Shemardov S.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 0020-1685

Source： Inorganic Materials, Vol.41, Iss.3, 2005-03, pp. : 239-242

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Electroless deposition of gold thin films on silicon for surface-enhanced infrared spectroelectrochemistry

By Miyake H.   Ye S.   Osawa M.  

Electrochemistry Communications, Vol. 4, Iss. 12, 2002-12 ,pp. : 973-977

Elsevier

Access to resources Recommend Favorite

Formation process of indium oxide transparent conducting films via thermal decomposition

By Sawada Y.   Nakazaki S.   Tachibana S.   Nishimoto Y.   Ozao R.  

Journal of Thermal Analysis and Calorimetry, Vol. 85, Iss. 1, 2006-07 ,pp. : 57-60

Springer Publishing Company

Access to resources Recommend Favorite

Thermal Oxidation of Ti and Pb Thin Films Deposited on Single-Crystal Silicon

By Logacheva V.A.   Turenko E.A.   Khoviv A.M.   Yatsenko O.B.  

Inorganic Materials, Vol. 37, Iss. 5, 2001-05 ,pp. : 466-468

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Deposition of Conductive Films on Semiconductor Substrates via Molybdenum Hexacarbonyl Decomposition in Glow Discharge

By Mittov O.N.   Ponomareva N.I.   Mittova I.Y.   Bezryadin M.N.  

Inorganic Materials, Vol. 37, Iss. 2, 2001-02 ,pp. : 161-165

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Comparative Study of Furnace and Flash Lamp Annealed Silicon Thin Films Grown by Plasma Enhanced Chemical Vapor Deposition

By Shrestha Maheshwar   Wang Keliang   Zheng Bocong   Mokrzycki Laura   Fan Qi Hua  

Coatings, Vol. 8, Iss. 3, 2018-03 ,pp. : 97-97

MDPI

Access to resources Recommend Favorite